منابع مشابه
Nanofabrication with a Helium Ion Microscope
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well as a mechanism for very precise nanofabrication [...
متن کاملScanning reflection ion microscopy in a helium ion microscope
Reflection ion microscopy (RIM) is a technique that uses a low angle of incidence and scattered ions to form an image of the specimen surface. This paper reports on the development of the instrumentation and the analysis of the capabilities and limitations of the scanning RIM in a helium ion microscope (HIM). The reflected ions were detected by their "conversion" to secondary electrons on a pla...
متن کاملSecondary Electron Imaging in the Helium Ion Microscope
Secondary electrons (SE) have been for many years the most user friendly, versatile, and convenient modes of imaging in the scanning electron microscope. The Helium Ion Microscope (HIM) also generates secondary electrons (iSE) and potentially offers significant advantages compared to the conventional SEM including much enhanced spatial resolution and improved image contrast. There are, however,...
متن کاملRecovery of Background Structures in Nanoscale Helium Ion Microscope Imaging
This paper discusses a two step enhancement technique applicable to noisy Helium Ion Microscope images in which background structures are not easily discernible due to a weak signal. The method is based on a preliminary adaptive histogram equalization, followed by 'slow motion' low-exponent Lévy fractional diffusion smoothing. This combined approach is unexpectedly effective, resulting in a com...
متن کاملHelium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings
Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabrication modification of nanostrings machined from an amorphous SiCN material. The modification consist...
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ژورنال
عنوان ژورنال: Microscopy Today
سال: 2007
ISSN: 1551-9295,2150-3583
DOI: 10.1017/s1551929500061897